Schnelle Rasterkraftmikroskopie durch moderne Regelungstechnik und mechatronische Systemintegration

摘要

In atomic force microscopy (AFM) high-performance and high precision control of the scanning-system is crucial. At high imaging speeds the dynamic behaviour of the scanner may cause imaging artefacts limiting the maximum imaging rate. This contribution discusses recent improvements for faster imaging by utilizing modern mechatronic and control engineering methods.